Yoichi TANAKA is a Chief Researcher at KURITA WATER INDUSTRIES LTD, where he currently manages JDP activities with Interuniversity of Micro Electronics Centre (IMEC) in Belgium. I have more than 10 years in the semiconductor industry on both the UPW facility and wet process business. I began my semiconductor career developing particle analysis technology down to 10nm using Filter -SEM method, and engage to manage particle behavior in UPW with a major component supplier. Recently, I started the JDP project with IMEC for wet clean processes. I have a lot of patents and conference presentations, publications (book chapters).