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Improvements of Energy Efficiency of UPW Treatment Systems to Reduce Carbon Footprint

Date Published: 2024 | Conference materials

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This presentation gives an update on an ongoing project for a holistic model showing all of the systems in the fab and their energy consumption. It shows work towards normalizing data into kWh or carbon footprint, which is becoming the measurement of choice. The ultrapure water system is a large energy user in the facility, and this presentation focuses on this research.

Authors: Andreas Neuber, Bob McIntosh
Tags: Energy ConservationUPW System

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