A novel nanoparticle counter for UPW based on acoustic cavitation

Date Published: 2023 | Conference materials

Log in or Join UltraFacility to access this content

To access our resources you will need to be a member of UltraFacility, log in to your account or purchase a membership to view this content.

Already have an account? Log in

Sub-20 nm nanoparticles in ultrapure water are known to be potential contaminants of semiconductors, thereby limiting the production yield. It is therefore essential to identify their sources and to measure their concentration and size in order to take appropriate measures for their removal. Traditional light-scattering technology has a low signal-to-noise ratio. This presentation presents a novel metrology based on acoustic counting to tackle these challenges.

Companies: Ovivo
Authors: Najib Alia, Ian Briggs, Philippe Rychen, Pia Herrling, Pranit Iyengar
Tags: UPWAcoustic Particle Counting (APC)NanoparticleMetrology and Analytical Technology

Related content

Conference material | 2018
Development of an Online Urea Monitor for Ultrapure Water Production in Semiconductor Fabrication Plants
Conference material | 2022
Multi-Species PPT-Level Impurity Detection in Electronic Bulk Gases Using Atmospheric Pressure Ionization Mass Spectrometry​
Conference material | 2015
THM – A Novel Sustainable Approach as a Global Solution for UPW Applications
Conference material | 2022
What is Known About Urea Control in UPW Systems?​

Back to Technical Knowledge Base

Not an UltraFacility Member?

Be part of year-round collaboration and knowledge exchange. Get access to the full range of tools leveraged by facility representatives and leading global experts from across the supply chain.

Book a demo

Find out how you can leverage UltraFacility Portal to achieve your business objectives today.

Request a demo