Drying of rinse water from parts is, for many process engineers, a final critical step of a process. Drying steps can be costly, energy and time consuming, and if not done properly will leave a non-volatile residue of minerals, detergents, and ions on the surface of the part - not to mention water stains. There are various methods of drying that may be employed; however, one of the best approaches is Marangoni drying for flat surfaces such as semiconductor wafers or disk drives.