Case studies on semiconductor ultrapure water and wastewater reclamation using the latest generation of RO Membranes
Date Published: 2023 | Conference materials
Log in or Join UltraFacility to access this content
To access our resources you will need to be a member of UltraFacility, log in to your account or purchase a membership to view this content.
Already have an account? Log in
In the semiconductor manufacturing process, a large amount of ultrapure water (UPW) is used in the cleaning operations performed before and after each process. In order to alleviate the shortage of limited water resources, the recovery and reuse of wastewater has been attracting attention.
Authors: Ishihara Satoru, Tomi Yasuhiro, David Shin
Tags: SemiconductorsWastewater ReclaimRO technologiesReverse Osmosis (RO)
Related content
Conference material | 2021
Doing more with less - minimizing data center water and wastewater
Technical journal archive | 2010
Use of Unique Fractional Electrodeionization in Power Plant Applications
Conference material | 2022
Advanced precipitation membrane treatment systems for fluoride wastewaters and RO scaling brine
Conference material | 2015
A Few Solutions for RO Reliability Improvement and Operational Costs Reduction
Back to Technical Knowledge Base