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Development and Evaluation of a 3 nm Ultrapure Liquid Quality Monitor

Date Published: 2020 | Conference materials

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This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the Ultrapure Water Production track, as part of the Critical Particle Monitoring session.

Companies: Kanomax FMT , University of Minnesota
Authors: Jihyeon Lee
Tags: SilicaUPWParticle PrecursorsIsopropyl Alcohol (IPA)

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