Enabling Advanced Semiconductor Yield and Sustainability via IRDS and SEMI Standards: Pre-conference Workshop
Date Published: 2024 | Conference materials
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The International Roadmap for Devices and Systems (IRDS) and SEMI taskforces offer updates for 2024 and an outlook to the year ahead. On the topic of yield enhancement, speakers discussed UPW, liquid chemicals and particle precursors. Regarding sustainability challenges the panel discussed water reclamation opportunities, the PFAS problem and carbon emission reduction strategies.
Authors: Slava Libman, Gary van Schooneveld, Lindsey Sullivan, Jason Tewksbury, Paul Kerr, Andreas Neuber, Bob McIntosh, Mustafa Badaroglu
Tags: IRDSSEMI StandardsYield enhancementEnvironmental sustainability
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