Enabling Advanced Semiconductor Yield and Sustainability via IRDS and SEMI Standards: Pre-conference Workshop
Date Published: 2024 | Conference materials
Log in or Join UltraFacility to access this content
To access our resources you will need to be a member of UltraFacility, log in to your account or purchase a membership to view this content.
Already have an account? Log in
The International Roadmap for Devices and Systems (IRDS) and SEMI taskforces offer updates for 2024 and an outlook to the year ahead. On the topic of yield enhancement, speakers discussed UPW, liquid chemicals and particle precursors. Regarding sustainability challenges the panel discussed water reclamation opportunities, the PFAS problem and carbon emission reduction strategies.
Authors: Slava Libman, Gary van Schooneveld, Lindsey Sullivan, Jason Tewksbury, Paul Kerr, Andreas Neuber, Bob McIntosh, Mustafa Badaroglu
Tags: IRDSSEMI StandardsYield EnhancementEnvironmental Sustainability
Related content
Conference material | 2016
UPW ITRS and SEMI: Past – Present – Future of Enabling Advanced Existing and Future Technologies
Conference material | 2022
2022 IRDS & SEMI Standards Update
Conference material | 2023
Suggestions of eco-friendly RO membrane operation (Focused on K-water’s RO plant )
Conference material | 2020
Technology Roadmap - Focusing on Enabling Yield of Next Generation Devices
Back to Technical Knowledge Base