Enhancing Water Utilization by Abatement Wastewater Recycling

Date Published: 2024 | Conference materials

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This presentation provides insights to the benefits and challenges of the treatment and recycling of abatement wastewater and highlights potential to enhance water utilization and contribute to making industrial processes more sustainable. Facility owners will discover new ways to save water in the sub fab and ways to integrate these practices into both existing fabs and the planning stages of new facilities.

Authors: Anita Haupt, Stavroula Sfaelou, Pascal Osten
Tags: Gas abatementWater Conservation

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