Date Published: 2023 | Conference materials
To access our resources you will need to be a member of UltraFacility, log in to your account or purchase a membership to view this content.
When faced with a hydrofluoric acid treatment capacity crunch, GlobalFoundries Fab 8 committed to the future by installing a state-of-the-art fluoride concentrator: Hydrofluoric Acid Reverse Osmosis, or HFRO. The system allows the company to dramatically decrease the volume of fluoride sent for treatment while producing valuable RO permeate that is used to feed gas abatements.