Date Published: 2024 | Conference materials
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Some specific water streams generated during semiconductor manufacturing can be rated as “low hanging fruits”, meaning chemically low or not contaminated and potential candidates for direct reclaim by mans of filtration only. Focusing on those and to avoid or at least reduce the hydraulic load to end-of-pipe water concepts by looking at the available quality data and expected risk for UPW production points to huge potential for cost and water saving.