Minimizing Particle and Metal Ion Contamination On Fluid Control Components

Date Published: 2013 | Technical journal archive

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The growing demand of advancing technology in the semiconductor industry has promoted new, innovative valve design improvements and research dedicated to material optimization. This article discusses the continuous refinements in valve component and material designs including details of testing-materials research, methodology and body material testing.

Authors: George Evangelos Drazinakis, Greg Michalchuk
Tags: PipingParticlesConstruction Materials

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