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Optimization of the primary pure water system configuration and new operational control for enabling minimal energy consumption on ultrapure water producing systems

Date Published: 2023 | Conference materials

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Due to the global increase of decarbonization, the demand of energy consumption reduction on ultrapure water producing systems in semiconductor fab has been increased. Kurita Water Industries has developed new system control technology for contributing the energy consumption reduction.

Authors: Masahito Tochinai, Yasuharu Minato, Midori Miyaji, Hideaki Iino
Tags: SustainabilityDecarbonisationUPWEnergy Conservation

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