Ozonated Water Reclaim on SCREEN Wet Tools

Date Published: 2023 | Conference materials

Log in or Join UltraFacility to access this content

To access our resources you will need to be a member of UltraFacility, log in to your account or purchase a membership to view this content.

Already have an account? Log in

Ozonated water is generated by a sub-unit, where unused Ozonated water get purged out to waste to keep concentration stable in which accounted for 90% of DIW going thought the ozone generator unit. By developing a ozonated water reclaim unit, we are able to recycle the unused ozonated water and resupply it back to the generator unit. By doing so, the project may reduce the unused ozonated water waste to 0 and estimate to save more than 5 billion gallons of water by 2030 as it is proliferated throughout the Intel fleet.

Authors: James Snow, Rey Tanaka, Yuta Nishimura, Russ Zornick, Tatsuhiro Suzuki, Jacob Dinh
Tags: Water ReclaimUPW recycling

Related content

Training series | 2018
End-of-Pipe Semiconductor Wastewater Reclaim
Conference material | 2023
Environmental Sustainability - Opening Panel
Conference material | 2018
End-of-Pipe Semiconductor Wastewater Reclaim
Conference material | 2023
IRDS/SEMI Workshop 2023

Back to Technical Knowledge Base

Not an UltraFacility Member?

Be part of year-round collaboration and knowledge exchange. Get access to the full range of tools leveraged by facility representatives and leading global experts from across the supply chain.

Book a demo

Find out how you can leverage UltraFacility Portal to achieve your business objectives today.

Request a demo