Join

Pilot Study and Full-Scale Plant Operation of CMP Wastewater Recycling by UF Module with Unique and Robust Air Backwashing and Airscrubbing Technologies

Date Published: 2024 | Conference materials

Log in or Join UltraFacility to access this content

To access our resources you will need to be a member of UltraFacility, log in to your account or purchase a membership to view this content.

Already have an account? Log in

This presentation demonstrates a novel UF membrane module with a unique module structure and robust air scrubbing technologies
that enables application in high SS wastewater. Also included is the significant cost reduction and improved water recovery rate for CMP wastewater recycling system achieved by utilizing the UF module with novel technologies, compared to conventional systems.

Companies: Kuraray
Authors: Hiroki Nakanishi, Youhei Yabuno
Tags: UltrafiltrationChemical Mechanical Planarization (CMP)

Related content

Technical journal archive | 2013
Semiconductor Industry Trends Highlighted at UPW Micro 2012
Learn more
Conference material | 2019
Chemical Mechanical Planarization (CMP) Wastewater Treatment using Membrane Distillation
Learn more
Technical journal archive | 2017
How to streamline wastewater treatment systems and make money out of waste
Learn more
Technical journal archive | 2013
Treatment of Wastewater for Reuse in a Cooling Tower
Learn more
Back to Technical Knowledge Base

Not an UltraFacility Member?

Be part of year-round collaboration and knowledge exchange. Get access to the full range of tools leveraged by facility representatives and leading global experts from across the supply chain.

JoinLearn more

Book a demo

Find out how you can leverage UltraFacility Portal to achieve your business objectives today.

Request a demo