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Predicting Hydrogen Peroxide concentration for effective control in Ultrapure Water

Date Published: 2023 | Conference materials

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In recent years, the semiconductor industry has tightened its requirements for ultrapure water (UPW) quality, demanding extremely low levels of impurities at the point of use. The presented work describes a novel method for predicting the amount of H2O2 in UPW as a function of flowrate, UV system power level, and background peroxide concentration

Authors: Ferdinando Crapulli
Tags: UPWUV ReactorHydrogen Peroxide (H2O2)

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