Reduction of Organic Wastewater via IPA and Water Separation Using a Zeolite Membrane, by Experiment and Simulation
Date Published: 2024 | Conference materials
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IPA/H2O waste liquid contains a significant amount of UPW drained to organic wastewater during a single-wafer wet cleaning process.
Th presented method shows advantage in terms of energy-saving and CO2 emissions reduction. Using this method, the industry can contribute to solving the issue of increasing organic wastewater at semiconductor
manufacturing facilities.
Companies: SCREEN SPE
Authors: Tomohiro Uemura, Yukifumi Yoshida, Shoyo Minami, Yusuke Ueda, Michinori Iwao, Masaya YamamotoTags: Isopropyl Alcohol (IPA)Energy Conservation
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