Towards Non-PFAS Alternatives for Ultra Pure Chemical Delivery Systems in the Next Generation Semiconductor Fab

Date Published: 2024 | Conference materials

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Fluorosurfactants are critical components for fab infrastructure which are under the spotlight for their PFAS-leaching potential. Finding alternatives for these fluorosurfactants such as ECTFE or PEEK would reduce the risk of PFAS from semiconductor manufacturing in the future. Reducing use of fluorinated materials in this way works towards a secure and sustainable materials supply chain.

Companies: Syensqo
Authors: Lawrence Chen
Tags: PFASCritical MaterialsThermoplastic

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