Ultrapure CO2 Supply and Recycle System for the Supercritical CO2 Drying Process in Nano-Scale Semiconductor Manufacturing
Date Published: 2019 | Conference materials
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This presentation was given at the Ultrapure Micro 2019 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the High Purity Gases & Precursors session.
Companies: Organo
Authors: Yoshinori Ono, Hiroshi Sugawara
Tags: Particle Count and DetectionMetrology and Analytical TechnologyHigh Purity Gases
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