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Impact of Sleeve Quartz Quality to the Total Costs of Ownership of Ultra Pure Water Reactor

Date Published: 2018 | Conference materials

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This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the Technology and Project Management in Semiconductor Water and Chemicals session.

Companies: Heraeus Group
Tags: Ultraviolet (UV)Cost Management

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