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Using Modelling to Establish Performance Requirements for Materials Used in Semiconductor Manufacturing UPW System

Date Published: 2024 | Conference materials

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This presentation explains that a new SEMI guide has been submitted for ballot that defining material performance for UPW systems to meet the IRDS roadmap requirements after 2028. PVDF especially for hot UPW applications does not meet the UPW requirements after 2028. The development cycle and adoption of a new materials is long, so this work is critical to intercept the future process requirements.

Authors: Katrin Wallheinke, Bob McIntosh, Gary van Schooneveld, Kamilla Faryna
Tags: SEMI StandardsPolyvinylidene Fluoride (PVDF)

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